( DAC 99 Item 13 ) ----------------------------------------------- [6/25/99]
"IMHO one of the most noteworthy companies at DAC was Numerical
Technologies or Numeritech. They offer a `phase-shifting' program
which facilitates creation of sub-0.25um geometries with +0.35um
equipment. My impression is that their s/w essentially analyzes
a database and adds patterns which cause creation of required polygons
through a combination of direct illumination and interference. This
eliminates some of the problems associated w/ sub-lambda lithography.
The license costs about $400K and is probably cheap compared to the
cost of equipment required to achieve similar geometries. However
it should be noted that the phase-shifting technique really only
applies to polysilicon and thus probably wouldn't achieve the max
possible density." ( http://www.numeritech.com )
- an anon engineer
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